High Pure 99.8% titanium grade 7 rounds sputtering targets ti alloy target for coating factory supplier
Product parameters
| Product name | Titanium target for pvd coating machine |
| Grade | Titanium (Gr1, Gr2, Gr5, Gr7,GR12) Alloy target: Ti-Al, Ti-Cr, Ti-Zr etc |
| Origin | Baoji city Shaanxi Province china |
| Titanium content | ≥99.5 (%) |
| Impurity content | <0.02 (%) |
| Density | 4.51 or 4.50 g/cm3 |
| Standard | ASTM B381; ASTM F67, ASTM F136 |
| Size | 1. Round target: Ø30--2000mm, thickness 3.0mm--300mm; 2. Plate Targe: Length: 200-500mm Width:100-230mm Thickness:3--40mm; 3. Tube target: Dia:30-200mm Thickness:5-20mm Length:500-2000mm; 4. Customized is available |
| Technique | Forged and CNC Machined |
| Application | Semiconductor separation, Film coating materials, Storage Electrode coating, Sputtering coating, Surface coating, Glass coating industry. |
Chemical requirements of titanium target
|
ASTM B265 |
GB/T 3620.1 |
JIS H4600 |
Elemental content(≤wt%) |
||||||
|
N |
C |
H |
Fe |
O |
Others |
||||
|
Titanium Pure |
Gr.1 |
TA1 |
Class1 |
0.03 |
0.08 |
0.015 |
0.20 |
0.18 |
/ |
|
Gr.2 |
TA2 |
Class2 |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
/ |
|
|
Titanium Alloy |
Gr.5 |
TC4 Ti-6Al-4V |
Class60 |
0.05 |
0.08 |
0.015 |
0.40 |
0.2 |
Al:5.5-6.75 V:3.5-4.5 |
|
Gr.7 |
TA9 |
Class12 |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
Pd:0.12-0.25 |
|
|
Gr.12 |
TA10 |
Class60E |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
Mo:0.2-0.4 Ni:0.6-0.9 |
|
Longitudinal mechanical properties at room temperature
|
Grade |
Tensile strength Rm/MPa(>=) |
Yield strength Rp0.2(MPa) |
Elongation A4D(%) |
Reduction of area Z(%) |
|
Gr1 |
240 |
140 |
24 |
30 |
|
Gr2 |
400 |
275 |
20 |
30 |
|
Gr5 |
895 |
825 |
10 |
25 |
|
Gr7 |
370 |
250 |
20 |
25 |
|
Gr12 |
485 |
345 |
18 |
25 |
Titanium Sputtering Targets
The common size of the titanium sputter target: Φ100*40, Φ98*40, Φ95*45, Φ90*40, Φ85*35, Φ65*40 etc.
Also can customize according to customer' requests or drawings
Target requirements: high purity, uniform crystal grains, and good compactness.
Purity: 99.5%, 99.95%, 99.98%, 99.995%.
Titanium Target Production process
titanium sponge --- smelted to titanium ingot --- test---cutting the ingot --- forging ---rolling ---peeling --- straightening---ultrasonic flaw detection --- packing
Titanium target Features
1. Low Density and High Specification Strength
2. Excellent Corrosion Resistance
3. Good Resistance to Effect of Heat
4. Excellent Bearing to Cryogenics Property
5. Nonmagnetic and Non-toxic
6. Good Thermal Properties
7. Low Modulus of Elasticity
Related products
-
Tungsten Target
Product parameters Product Name Tungsten(W)sputtering target Grade W1 Available Purity(%) 99.5%,99.8%,99.9%,99.95%,99.99% Shape: Plate, round, rotary, pipe/tube Specification As customers demands Standard ASTM B760-07,GB/T 3875-06 Density ≥19.3g/cm3 Melting point 3410°C Atomic volume 9.53 cm3/mol Temperature coefficient of resistance 0.00482 I/℃ Sublimation heat 847.8 kJ/mol(25℃) Latent heat of melting 40.13±6.67kJ/mol...
-
Tantalum Target
Product parameters Product Name：high purity tantalum target pure tantalum target Material Tantalum Purity 99.95%min or 99.99%min Color A shiny, silvery metal that is very resistant to corrosion. Other name Ta target Standard ASTM B 708 Size Dia >10mm * thick >0.1mm Shape Planar MOQ 5pcs Delivery time 7days Used Sputtering Coating Machines Table 1: Chemical composition ...
-
Niobium Target
Product parameters Specification Item ASTM B393 9995 pure polished niobium target for industry Standard ASTM B393 Density 8.57g/cm3 Purity ≥99.95% Size according to customer's drawings Inspection Chemical composition testing, Mechanical testing, Ultrasonic inspection, Appearance size detection Grade R04200, R04210, R04251, R04261 Surface polishing, grinding Technique sintered, rolled, forged Feature High temperature resi...
-
high purity round shape 99.95% Mo material 3N5 ...
Product parameters Brand Name HSG Metal Model Number HSG-moly target Grade MO1 Melting point(℃) 2617 Processing Sintering/ Forged Shape Special Shape Parts Material Pure molybdenum Chemical Composition Mo:> =99.95% Certificate ISO9001:2015 Standard ASTM B386 Surface Bright and Ground Surface Density 10.28g/cm3 Color Metallic Luster Purity Mo:> =99.95% Application PVD coating film in glass industry , ion pl...