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Cathodic Cobalt - Tantalum Target – HSG Metal

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Cathodic Cobalt - Tantalum Target – HSG Metal Detail:

Product parameters

Product Name:high purity tantalum target  pure tantalum target
Material Tantalum
Purity 99.95%min or 99.99%min 
Color A shiny, silvery metal that is very resistant to corrosion.
Other name Ta  target
Standard ASTM B 708 
Size Dia >10mm * thick >0.1mm
Shape Planar
MOQ 5pcs
Delivery time 7days
Used Sputtering Coating Machines 

Table 1: Chemical composition

Chemistry (%)
Designation Chief component Impurities   maxmium
Ta Nb Fe Si Ni W Mo Ti Nb O C H N
Ta1 Remainder   0.004 0.003 0.002 0.004 0.006 0.002 0.03 0.015 0.004 0.0015 0.002
Ta2 Remainder   0.01 0.01 0.005 0.02 0.02 0.005 0.08 0.02 0.01 0.0015 0.01

Table 2: Mechanical requirements (annealed condition)

Grade and size

Annealed

Tensile strength min, psi (MPa)

Yield strength min,psi (MPa)(2%)

Elongation min, % (1 inch gage length)

Sheet, foil. and board (RO5200, RO5400) Thickness<0.060″(1.524mm) Thickness≥0.060″(1.524mm)

30000 (207)

20000 (138)

20

25000 (172)

15000 (103)

30

Ta-10W (RO5255) Sheet, foil. and board

70000 (482)

60000 (414)

15

70000 (482)

55000 (379)

20

Ta-2.5W (RO5252) Thickness<0.125″ (3.175mm) Thickness≥0.125″ (3.175mm)

40000 (276)

30000 (207)

20

40000 (276)

22000 (152)

25

Ta-40Nb (RO5240) Thickness<0.060″(1.524mm)

40000 (276)

20000 (138)

25

Thickness>0.060″(1.524mm)

35000 (241)

15000 (103)

25

Size and Purity

Diameter: dia (50~400)mm

Thickness: (3~28mm)

Grade: RO5200,RO 5400, RO5252(Ta-2.5W), RO5255(Ta-10W)

Purity: >=99.95% , >=99.99%

Our advantage

Recrystallization: 95% minimum Grain size: minimum 40μm Surface roughness: Ra 0.4 max Flatness: 0.1mm or 0.10% max. Tolerance: diameter tolerance +/- 0.254

Application

Tantalum target, as an electrode material and surface engineering material, has been widely used in the coating industry of liquid crystal display (LCD), heat-resistant corrosion and high conductivity.


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